講員: 國立成功大學 張晉愷教授
講題: Plasmonics Lithography for Advanced VLSI Fabrication Technology
時間: 3/12 週五 14:00-15:30
講者簡介: Dr. Chin-Kai Chang joined the Department of Mechanical Engineering of National Cheng Kung University in 2020/02. He received the B.S. degree in Mechanical Engineering from National Taiwan University in 2004. He started the M.S. and Ph.D. programs at Solid Mechanics Group, Institute of Applied Mechanics, National Taiwan University in 2004 and 2009, respectively. Prior to joining NCKU, he worked at Materials & Chemical Research Laboratory at Industrial Technology Research Institute (ITRI) from 2009/09 to 2013/09 and Nano Patterning Technology Division at Taiwan Semiconductor Manufacturing Company (TSMC) from 2013/09 to 2020/02. His research fields of interest include Micro/Nano Fabrication Technology, Plasmonics, and Opto-Mechanical Systems.